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자료 필터
자료유형
발행연도
2006 ~ 2026
2006 2026
키워드
언어
전체 503건 중 1번부터 10번까지의 결과를 표시합니다.
2026
Article
Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithography
- Chu, Thi Thu Huong ;
- Le, Dan N. ;
- Lee, Minjong ;
- Narayan, Dushyant M. ;
- Kim, Doo San ;
- ... Ahn, Jinho ;
- ... Sung, Myung Mo ;
- 외 7명
- 2026-06
- Chemical Science
- ROYAL SOC CHEMISTRY
Article
Ultrahigh thermoelectric figure of merit in n-type TiS2 thin films via hybrid superlattice with nanocrystal-amorphous composites
- Nguyen, Duyen Thi ;
- Palani, Indirajith ;
- Kim, Jongchan ;
- Cho, Kyeongjae ;
- Song, Da Som ;
- ... Jang, Jaeyoung ;
- ... Sung, Myung Mo ;
- 외 4명
- 2026-05
- Applied Surface Science
- ELSEVIER
Article
Vapor-Phase Infiltration of Al-Doped Zinc Oxide into Poly(Methyl Methacrylate) for Enhanced Low-Temperature Thermoelectric Performance
- Tran, Dai Cuong ;
- Palani, Indirajith ;
- Kim, Heeseo ;
- Lee, Sangmin ;
- Cho, Sangho ;
- ... Sung, Myung Mo
- 2026-05
- INORGANICS
- MDPI
Article
Vapor-phase dry development enabling high-resolution and improved CDU in EUV photoresists
- Seok, Ji-Hoo ;
- Kim, Jiwon ;
- Ji, Hyeonseok ;
- Lee, Jaehyuk ;
- Lee, Taeho ;
- ... Sung, Myung Mo ;
- ... Ahn, Jinho ;
- 외 1명
- 2026-04
- Proceedings of SPIE - The International Society for Optical Engineering
- SPIE
Article
Vapor-Phase Dry Development of a Nanoscale Zn-Based Metal-Organic Extreme Ultraviolet Photoresist via Surface-Limited β-Diketone Chelation for High-Resolution Patterning
- Seok, Ji-Hoo ;
- Kim, Jiwon ;
- Ji, Hyeonseok ;
- Lee, Jaehyuk ;
- Lee, Taeho ;
- ... Sung, Myung Mo ;
- ... Ahn, Jinho ;
- 외 1명
- 2026-03
- ACS APPLIED NANO MATERIALS
- AMER CHEMICAL SOC
2025
Article
Unraveling the relative impact of material and optical stochastic effects on EUV LWR
- Park, Ji Young ;
- Seo, Yongbeom ;
- Shin, Dong-Hun ;
- Chae, Hyunwoo ;
- Jang, Yunsu ;
- ... Sung, Myung Mo ;
- 외 6명
- 2025-12
- Scientific Reports
- NATURE PORTFOLIO
Conference
Highly Conductive Transparent Hybrid Superlattices with Excellent GasBarrier Properties and Flexibility
- 2025-11-19
Conference
Molecular layer deposition-based vertical molecular wire structure hybrid multilayer EUV resist for ultralow LER
- 2025-11-19
Article
Scalable Ternary Logic Device Based on TeOx/IGTO Heterojunction Transistor
- Jung, Chanwoo ;
- Lee, Junho ;
- Heo, Sung Hun ;
- Yoon, Seong Hun ;
- Kim, Taikyu ;
- ... Sung, Myung Mo ;
- ... Jeong, Jae Kyeong
- 2025-10
- Advanced Materials for Optics and Electronics
- WILEY-V C H VERLAG GMBH
Article
Ultralow line edge roughness of hybrid multilayer Extreme ultraviolet resist with vertical molecular wire structure
- Lee, Jaehyuk ;
- Ji, Hyeonseok ;
- Koh, Chawon ;
- Lee, Juyeong ;
- Seok, Ji-Hoo ;
- ... Ahn, Jinho ;
- ... Sung, Myung Mo ;
- 외 15명
- 2025-08
- Materials Today
- ELSEVIER SCI LTD