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Measurement of the total energy losses per electron-ion lost in argon,helium and oxygen inductively coupled plasmas
- 제목
- Measurement of the total energy losses per electron-ion lost in argon,helium and oxygen inductively coupled plasmas
- 저자
- 정진욱
- 발행일
- 2009-10-20
- 학회명
- 62th Gaseous Electronics Conference
- 개최지
- saratoga springs,NY U.S.A