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The Influence of NH3 Plasma Treatment on ALD HfO2-IGZO TFTs

제목
The Influence of NH3 Plasma Treatment on ALD HfO2-IGZO TFTs
저자
최창환
발행일
2017-08-31
학회명
International Meeting on Information Display (IMID 2017)
개최지
Busan, Korea

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