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Improved Ferroelectric Characteristics and Synaptic Function using ALD La-doped HfO2 Thin Film and TaN Electrode
- 제목
- Improved Ferroelectric Characteristics and Synaptic Function using ALD La-doped HfO2 Thin Film and TaN Electrode
- 저자
- 최창환
- 발행일
- 2021-11-15
- 학회명
- nternational Workshop on Dielectric Thin Films for Future Electron Devices - Science and Technology - (IWDTF)
- 개최지
- On-line Virtual