상세 보기
Impedance Measurement of SiC Using Multi-Frequency Analysis for Real-Time Control of the Focus Ring in Plasma Processing
- 제목
- Impedance Measurement of SiC Using Multi-Frequency Analysis for Real-Time Control of the Focus Ring in Plasma Processing
- 저자
- 정진욱
- 발행일
- 2022-11-14
- 학회명
- Korean international semiconductor conference on manufacturing technology 2022
- 개최지
- 파라다이스호텔(부산)