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Effect of Mechanical Sterss on Ferroelectric Properties of Fully-Atomic Layer Deposition Processed TiN/HfZrOx/TiN Stacks
- 제목
- Effect of Mechanical Sterss on Ferroelectric Properties of Fully-Atomic Layer Deposition Processed TiN/HfZrOx/TiN Stacks
- 저자
- 최창환
- 발행일
- 2018-07-30
- 학회명
- International Conference on Atomic Layer Deposition
- 개최지
- Incheon, Korea