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Measurement of individual ion density using the floating harmonics probe in Ar-He mixed inductively coupled plasma
- 제목
- Measurement of individual ion density using the floating harmonics probe in Ar-He mixed inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2021-10-08
- 학회명
- 74th Annual Gaseous Electronics Conference
- 개최지
- Virtual