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Multi-Threshold Voltage(Vth) Engineering Using ALD TaN-Based HKMG Gate Stack for Advanced Logic ang DRAM Devices
- 제목
- Multi-Threshold Voltage(Vth) Engineering Using ALD TaN-Based HKMG Gate Stack for Advanced Logic ang DRAM Devices
- 저자
- 최창환
- 발행일
- 2025-11-13
- 학회명
- Korea International Semiconductor Conference on Manufacturing Technology (KISM)
- 개최지
- Paradise Hotel Busan