Multi-Threshold Voltage(Vth) Engineering Using ALD TaN-Based HKMG Gate Stack for Advanced Logic ang DRAM Devices

제목
Multi-Threshold Voltage(Vth) Engineering Using ALD TaN-Based HKMG Gate Stack for Advanced Logic ang DRAM Devices
저자
최창환
발행일
2025-11-13
학회명
Korea International Semiconductor Conference on Manufacturing Technology (KISM)
개최지
Paradise Hotel Busan