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Tunable external RF choke filter design for single Langmuir probe in RF discharges
- 제목
- Tunable external RF choke filter design for single Langmuir probe in RF discharges
- 저자
- 정진욱
- 발행일
- 2014-11-04
- 학회명
- 67th Annual Gaseous Electronics Conference
- 개최지
- Raleigh, NC