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Vth Modulation of HfO2-MOSFETs with ALD TiN Using TiCl4 and NH3

제목
Vth Modulation of HfO2-MOSFETs with ALD TiN Using TiCl4 and NH3
저자
최창환
발행일
2017-02-15
학회명
한국반도체학술대회
개최지
대명 비발디파크, 한국

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