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The Impact of CF4 Plasma Treatment on the Performance of HfO2/IGZO Thin film Transistors

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The Impact of CF4 Plasma Treatment on the Performance of HfO2/IGZO Thin film Transistors
저자
최창환
발행일
2024-01-25
학회명
31회 한국반도체학술대회 (KCS)
개최지
경주화백컨벤션센터

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