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Ammonium Polysulfide Passivation for Interface between GaN and Atomic-Layer-Deposited HfAlOx

제목
Ammonium Polysulfide Passivation for Interface between GaN and Atomic-Layer-Deposited HfAlOx
저자
최창환
발행일
2014-02-26
학회명
한국반도체학술대회
개최지
한양대학교

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