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Correlation between electrical characteristics of RF bias and plasma parameters in biased inductively coupled plasmas
- 제목
- Correlation between electrical characteristics of RF bias and plasma parameters in biased inductively coupled plasmas
- 저자
- 정진욱
- 발행일
- 2013-08-25
- 학회명
- 9th Asian-European International Conference On Plasma Surface Engineering
- 개최지
- Jeju Island