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A study on the correlations between external discharge parameters and plasma characteristics in an inductively coupled plasma using transformer circuit model
- 제목
- A study on the correlations between external discharge parameters and plasma characteristics in an inductively coupled plasma using transformer circuit model
- 저자
- 정진욱
- 발행일
- 2012-07-04
- 학회명
- 4th ICMAP
- 개최지
- 제주도