Measurement of the surface charge accumulation using anodic aluminum ox-ide(AAO) structure in an inductively coupled plasma

제목
Measurement of the surface charge accumulation using anodic aluminum ox-ide(AAO) structure in an inductively coupled plasma
저자
정진욱
발행일
2014-11-04
학회명
67th Annual Gaseous Electronics Conference
개최지
Raleigh, NC