상세 보기
Electron energy probability function measurement in a 2 MHz and 13.56 MHz dual frequency capacitively argon discharge
- 제목
- Electron energy probability function measurement in a 2 MHz and 13.56 MHz dual frequency capacitively argon discharge
- 저자
- 정진욱
- 발행일
- 2019-10-28
- 학회명
- The 72nd Annual Gaseous Electronics Conference
- 개최지
- Texas A&M Hotel