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Characterization of inductively coupled plasma driven with ferrites cores at 400kHz
- 제목
- Characterization of inductively coupled plasma driven with ferrites cores at 400kHz
- 저자
- 정진욱
- 발행일
- 2005-06-20
- 학회명
- IEEE International Conference on Plasma Science
- 개최지
- 몬테레이,CA, USA