An Ultra-Sensitive Sensor Platform Using Monolithic 3-Dimensional Integration and Membrane-Gate FET

제목
An Ultra-Sensitive Sensor Platform Using Monolithic 3-Dimensional Integration and Membrane-Gate FET
저자
최창환
발행일
2017-09-27
학회명
International Workshop on MEMS and Sensor System (IWMS)
개최지
Ho Chi Minh, Vietnam