ScholarWorks@한양대학교

상세 보기

The Measurement of the Electron Energy Distribution Function in Inductively Coupled Plasma

제목
The Measurement of the Electron Energy Distribution Function in Inductively Coupled Plasma
저자
정진욱
발행일
2002-10-24
학회명
78회 정기총회및 연구논문발표회
개최지
한양대학교

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.