상세 보기
On modified finite difference method to obtain the electron energy distribution functions in Langmuir probes
- Kang, Hyun-Ju;
- Choi, Hyeok;
- Kim, Jae-Hyun;
- Lee, Se-Hun;
- Yoo, Tae-Ho;
- ... Chung, Chin-Wook
Citations
WEB OF SCIENCE
2Citations
SCOPUS
2초록
A modified central difference method (MCDM) is proposed to obtain the electron energy distribution functions (EEDFs) in single Langmuir probes. Numerical calculation of the EEDF with MCDM is simple and has less noise. This method provides the second derivatives at a given point as the weighted average of second order central difference derivatives calculated at different voltage intervals, weighting each by the square of the interval. In this paper, the EEDFs obtained from MCDM are compared to those calculated via the averaged central difference method. It is found that MCDM effectively suppresses the noises in the EEDF, while the same number of points are used to calculate of the second derivative.
키워드
NUMERICAL DIFFERENTIATION; PLASMA PARAMETERS; ARGON DISCHARGE; RF DISCHARGE; TRANSITION
- 제목
- On modified finite difference method to obtain the electron energy distribution functions in Langmuir probes
- 저자
- Kang, Hyun-Ju; Choi, Hyeok; Kim, Jae-Hyun; Lee, Se-Hun; Yoo, Tae-Ho; Chung, Chin-Wook
- 발행일
- 2016-06
- 유형
- Article
- 권
- 23
- 호
- 6
- 페이지
- 1 ~ 5