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The effects of nitrogen and silicon profile on high-k MOSFET performance and Bias Temperature Instability
- 제목
- The effects of nitrogen and silicon profile on high-k MOSFET performance and Bias Temperature Instability
- 저자
- 최창환
- 발행일
- 2004-06-17
- 학회명
- Symposium on VLSI Technology (VLSI)
- 개최지
- Honolulu, USA