High-resolution patterning of aluminum thin films with a water-mediated transfer process

  • Lee, Byoung H
  • Cho, Yeon H
  • Lee, Haiwon
  • Lee, Ki-Dong
  • Kim, Sang H
  • ... Sung, Myung M
Citations

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39
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44

초록

Water-mediated nanotransfer printing (nTP) is based on the direct transfer of a metal thin film from a stamp to a substrate via water-mediated surface bonding between the stamp and the substrate. The procedure can generate aluminum patterns with feature sizes as small as 60 ran (see figure). The transferred Al patterns are chemically bound to the substrate surface and, thus, exhibit strong adhesion.

키워드

SELF-ASSEMBLED MONOLAYERSSURFACESSTAMPGOLDCHEMISTRIESRESISTIVITYDEPOSITIONMORPHOLOGYBRIDGESSILICON
제목
High-resolution patterning of aluminum thin films with a water-mediated transfer process
저자
Lee, Byoung HCho, Yeon HLee, HaiwonLee, Ki-DongKim, Sang HSung, Myung M
DOI
10.1002/adma.200601884
발행일
2007-07
유형
Article
저널명
Advanced Materials
19
13
페이지
1714 ~ 1718