Development of Polymeric Layer for Enhancing The Adhesion of Nano-devices Fabricated by The Nanotransfer Molding Method

제목
Development of Polymeric Layer for Enhancing The Adhesion of Nano-devices Fabricated by The Nanotransfer Molding Method
저자
성명모
발행일
2013-02-19
학회명
제44회 한국진공학회
개최지
보광휘닉스파크