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Investigation of adhesion at LPCVD and PECVD silicon nitride/copper film interface by laser spallation technique
- 제목
- Investigation of adhesion at LPCVD and PECVD silicon nitride/copper film interface by laser spallation technique
- 저자
- 김학성
- 발행일
- 2024-06-27
- 학회명
- 대한기계학회 춘계학술대회