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Work-Function Engineering and Improved Stability using PEALD TiCoN Metal Gate for HKMG Device

제목
Work-Function Engineering and Improved Stability using PEALD TiCoN Metal Gate for HKMG Device
저자
최창환
발행일
2021-01-28
학회명
한국반도체학술대회 (KCS)
개최지
온라인

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