The Effect of Oxygen Vacancy on the Coerceive Field of Al-doped Hafnium Oxide Ferrroelectric Thin Film during Wake-Up Process

제목
The Effect of Oxygen Vacancy on the Coerceive Field of Al-doped Hafnium Oxide Ferrroelectric Thin Film during Wake-Up Process
저자
최창환
발행일
2020-11-23
학회명
한국세라믹학회 추계학술대회
개최지
대전 DCC