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Improvement of spatial distribution measurement of plasma parameters through asymmetric double Langmuir probe
- 제목
- Improvement of spatial distribution measurement of plasma parameters through asymmetric double Langmuir probe
- 저자
- 정진욱
- 발행일
- 2022-11-16
- 학회명
- Korean international semiconductor conference on manufacturing technology 2022
- 개최지
- 파라다이스호텔(부산)