Impacts of Hydrogen Profile on The Reliability Characteristics of Flash Memory Using SiO2/Si3N4/SiO2 Stack Film by Post Annealing

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Impacts of Hydrogen Profile on The Reliability Characteristics of Flash Memory Using SiO2/Si3N4/SiO2 Stack Film by Post Annealing
저자
최창환
발행일
2024-01-26
학회명
31회 한국반도체학술대회 (KCS)
개최지
경주화백컨벤션센터