Low-energy electron beam control via magnetic confinement and acceleration voltage: implications for photoresist etching (vol 35 , 035001 , 2026)

초록

In the original version of the article metadata, Acknowledgment contains an incorrect grant number RS-2023-00237362. The Grant Number should be revised into RS-2023-00237543. In addition, the following funding information should be added to the Acknowledgment: 2410003887, 1415187722, 00154752, 1415187459, and RS-2024-0043780. This correction includes both the revision of the incorrect grant number and the addition of previously omitted funding information. Therefore, the Acknowledgment should be revised as follows