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Comparison of plasma density measurements using electrical probes and microwave probes in inductively coupled plasmas
- 제목
- Comparison of plasma density measurements using electrical probes and microwave probes in inductively coupled plasmas
- 저자
- 정진욱
- 발행일
- 2005-06-24
- 학회명
- IEEE International Conference on Plasma Science
- 개최지
- 몬터레이,CA, US