The Effects of (NH4)Sx Treatment on n-GaN MOS Device with Nano-Laminated ALD HfAlOx and Ru Gate Stack

제목
The Effects of (NH4)Sx Treatment on n-GaN MOS Device with Nano-Laminated ALD HfAlOx and Ru Gate Stack
저자
최창환
발행일
2015-06-30
학회명
Insulating Films on Semiconductors (INFOS)
개최지
Udine, Italy