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Work-Function Modulation of ALD TaN Metal Gate using Different Precursor and Capping Materials in HfO2-based MOS Device
- 제목
- Work-Function Modulation of ALD TaN Metal Gate using Different Precursor and Capping Materials in HfO2-based MOS Device
- 저자
- 최창환
- 발행일
- 2021-01-19
- 학회명
- Nano Convergence Conference (NCC)
- 개최지
- 곤지암 리조트