상세 보기
Work-Function Modulation using Atomic Layer Deposited TaN ad Ternary TaAlN Metal Gate
- 제목
- Work-Function Modulation using Atomic Layer Deposited TaN ad Ternary TaAlN Metal Gate
- 저자
- 최창환
- 발행일
- 2023-07-25
- 학회명
- International Conference on Atomic Layer Deposition
- 개최지
- Bellevue, Washington, USA