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Influence of Post-Cooling Process on the Ferroelectric Properties of Lanthanum-doped Hafnium Oxide (La:HfO2) Thin Film
- 제목
- Influence of Post-Cooling Process on the Ferroelectric Properties of Lanthanum-doped Hafnium Oxide (La:HfO2) Thin Film
- 저자
- 최창환
- 발행일
- 2021-01-29
- 학회명
- 한국반도체학술대회 (KCS)
- 개최지
- 온라인