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New Fabrication Methods of Nanostructural Materials using Molecular Layer Deposition with Atomic Layer Deposition
- 제목
- New Fabrication Methods of Nanostructural Materials using Molecular Layer Deposition with Atomic Layer Deposition
- 저자
- 성명모
- 발행일
- 2008-11-04
- 학회명
- The 2008 Asian Conference on Nanoscience and Nanotechnology
- 개최지
- 싱가폴 Biopolis