New Fabrication Methods of Nanostructural Materials using Molecular Layer Deposition with Atomic Layer Deposition

제목
New Fabrication Methods of Nanostructural Materials using Molecular Layer Deposition with Atomic Layer Deposition
저자
성명모
발행일
2008-11-04
학회명
The 2008 Asian Conference on Nanoscience and Nanotechnology
개최지
싱가폴 Biopolis