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Measurement of electron temperature and argon metastable density measuring optical emission in inductively coupled plasmas
- 제목
- Measurement of electron temperature and argon metastable density measuring optical emission in inductively coupled plasmas
- 저자
- 정진욱
- 발행일
- 2007-10-02
- 학회명
- 60th annual gases electronics conference
- 개최지
- arlington, VA, USA