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The effect of step ionizations on the high energy electron temperature in an argon inductively coupled plasma
- 제목
- The effect of step ionizations on the high energy electron temperature in an argon inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2018-11-07
- 학회명
- Gaseous Electronics Conference
- 개최지
- Oragon convention center, Portland