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The Role Of Oxygen in High-k and Metal Gate (HKMG) Device for Work Function Tuning
- 제목
- The Role Of Oxygen in High-k and Metal Gate (HKMG) Device for Work Function Tuning
- 저자
- 최창환
- 발행일
- 2011-12-16
- 학회명
- International Symposium on Fusion Technololgy
- 개최지
- Dalian, China