Low Temperature and Ion-Cut Based Monolithic 3D Process Integration Platform Incorporated with CMOS, RRAM and Photo-Sensor Circuits

제목
Low Temperature and Ion-Cut Based Monolithic 3D Process Integration Platform Incorporated with CMOS, RRAM and Photo-Sensor Circuits
저자
최창환
발행일
2020-12-15
학회명
IEEE International Electron Devices Meeting (IEDM)
개최지
Virtual Conference