상세 보기
Electron energy distribution function measurement in a CO2/Ar induc- tively coupled plasma
- 제목
- Electron energy distribution function measurement in a CO2/Ar induc- tively coupled plasma
- 저자
- 정진욱
- 발행일
- 2017-11-07
- 학회명
- 70th Annual Gaseous Electronics Conference
- 개최지
- Pittsburgh, Pennsylvania