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The digital matching network for a ferromagnetic inductively coupled plasma driven at 400kHz
- 제목
- The digital matching network for a ferromagnetic inductively coupled plasma driven at 400kHz
- 저자
- 정진욱
- 발행일
- 2007-06-17
- 학회명
- Plused power plasma science
- 개최지
- 뉴멕시코, 엘버퀴퀴