상세 보기
Electrical characteristics and plasma parameters during E – H mode transition in an inductively coupled plasma
- 제목
- Electrical characteristics and plasma parameters during E – H mode transition in an inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2018-11-07
- 학회명
- Gaseous Electronics Conference
- 개최지
- Oragon convention center