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Electron-assisted PR etching in an inductivley coupled oxygen plasma via low-energy electron beam
- 제목
- Electron-assisted PR etching in an inductivley coupled oxygen plasma via low-energy electron beam
- 저자
- 정진욱
- 발행일
- 2022-11-14
- 학회명
- Korean international semiconductor conference on manufacturing technology 2022
- 개최지
- 파라다이스호텔(부산)