Influence of Oxidant Types on the Ferroelectric Properties of ALD Undoped HfO2 Thin Film

제목
Influence of Oxidant Types on the Ferroelectric Properties of ALD Undoped HfO2 Thin Film
저자
최창환
발행일
2020-11-04
학회명
The 6th International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE)
개최지
제주 라마다호텔