ScholarWorks@한양대학교

상세 보기

Fabrication of Nano-Size Cross Array Patterns by Nano Imprint Lithography

제목
Fabrication of Nano-Size Cross Array Patterns by Nano Imprint Lithography
저자
최창환
발행일
2014-02-26
학회명
한국반도체학술대회
개최지
한양대학교

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.