Improved Performance of Gate-Last FDSOI Tunnel Field-Effect-Transistors (TFETs) with Modulating Al2O3 Composition in Atomic Layer Deposited HfAlOx Gate Dielectrics

제목
Improved Performance of Gate-Last FDSOI Tunnel Field-Effect-Transistors (TFETs) with Modulating Al2O3 Composition in Atomic Layer Deposited HfAlOx Gate Dielectrics
저자
최창환
발행일
2017-06-28
학회명
Conference on Insulating Films on Semiconductors (INFOS)
개최지
포츠담, 독일