상세 보기
Multi-Layer deposition process control using impedence feedback system for 3D device fabrication
- 제목
- Multi-Layer deposition process control using impedence feedback system for 3D device fabrication
- 저자
- 정진욱
- 발행일
- 2016-03-09
- 학회명
- ISPlasma2016/IC-PLANTS2016
- 개최지
- Nagoya University, Nagoya, Japan