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The effect of RF bias frequency on the ion energy distribution in an ultra-low electron temperature plasma
- 제목
- The effect of RF bias frequency on the ion energy distribution in an ultra-low electron temperature plasma
- 저자
- 정진욱
- 발행일
- 2023-11-08
- 학회명
- 69th American Vacuum Society
- 개최지
- portland, oregon convention center