상세 보기
Measurement of the plasma density and electron temperature uniformities in inductively coupled using 2D real time measurement method
- 제목
- Measurement of the plasma density and electron temperature uniformities in inductively coupled using 2D real time measurement method
- 저자
- 정진욱
- 발행일
- 2011-11-15
- 학회명
- 64th Annual Gaseous Electronics Conference
- 개최지
- Salt Lake City, Utah