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Work-Function Modulation and Further EOT scaling of High-K/Metal Gate Device
- 제목
- Work-Function Modulation and Further EOT scaling of High-K/Metal Gate Device
- 저자
- 최창환
- 발행일
- 2013-01-30
- 학회명
- Semicon Korea 2013 (SEMI)-SEMI Technology Symposium
- 개최지
- COEX, SEOUL